Capability: Attribute Commercial High Precision Typical Material Quartz Typical Diameter (mm) 10, 15, 20, 25.4 Diameter Tolerance (mm) +0.00/-0.2mm +0.00/-0.05 Thickness Tolerance (mm) +/-0.1 +/-0.05 Parallelism (arc min.) <20” <5” Flatness (per 25mm@632.8nm) λ/4 λ/20 Surface Quality (scratch/dig) 60-40 10-5 Bevel (face width×45°mm) 0.2-0.5 0.05-0.2 Coating Specified by user for VAR or DAR type
Attribute
Commercial
High Precision
Typical Material
Quartz
Typical Diameter (mm)
10, 15, 20, 25.4
Diameter Tolerance (mm)
+0.00/-0.2mm
+0.00/-0.05
Thickness Tolerance (mm)
+/-0.1
+/-0.05
Parallelism (arc min.)
<20”
<5”
Flatness (per 25mm@632.8nm)
λ/4
λ/20
Surface Quality (scratch/dig)
60-40
10-5
Bevel (face width×45°mm)
0.2-0.5
0.05-0.2
Coating
Specified by user for VAR or DAR type
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